| Zugriffsnummer | 17890 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Tactile probes for micro metrology |
| Autor(in); Institution |
Balke, Michael; TU Braunschweig, IHT, Braunschweig, GERMANY
Peiner, Erwin; TU Braunschweig, IHT, Braunschweig, GERMANY
Doering, Lutz; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
|
| Quelle/Jahr | Technische Universität Ilmenau, Fakultät für Maschinenbau: Tagungsunterlagen : 50. IWK, 19. - 23.09.2005 ; IMEKO 21. - 24.09.2005 ; AMAM 25. - 30.09.2005:(2005) |
| Availability | [CD-ROM] ; file name: IMEKO 4_0_2.pdf |
| Herausgeber(in) |
Scharff, Peter
|
| ISBN | 3-932633-99-7 |
| Verlag | Ilmenau: Techn. Universität |
| Konferenzangaben | Joint International IMEKO TC1+ TC7 Symposium, Ilmenau, 21-24, September, 2005, Germany |
| Freie Schlagworte | micro metrology ; tactile probe ; piezoresistive strain gauge ; cantilever ; ANSYS |
| Zusammenfassung | A tactile sensor is described for probing of high aspect ratio structures of sub-millimeter dimensions. Also different concepts of a tactile sensor are shown. Future work will include further reduction of cantilever width and height for measuring appropriate samples and realization and test of the described concepts. The freedom of design of cantilever and tip geometry in addition to the miniaturization potential of the concept provide excellent possibilities to adopt tactile probing to various metrology tasks at micro components. |
