| Zugriffsnummer | 17878 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Investigation of thermal expansion homogeneity by optical interferometry |
| Autor(in); Institution |
Schödel, René; 5.4, Längenmaße und -messmittel, PTB-Braunschweig
|
| Quelle/Jahr | Nano- and micro-metrology:(2005), 0Q-1 - 0Q-8 |
| Schriftenreihe | Proceedings of SPIE: 5858 |
| Herausgeber(in) |
Ottevaere, Heidi
|
| ISSN | 0277-786X |
| ISBN | 0-8194-5858-9 |
| Verlag | Bellingham, Wash.: SPIE |
| Konferenzangaben | Nano- and Micro-Metrology, Munich, 16-17, June, 2005, Germany |
| Freie Schlagworte | interferometry ; interferometer ; absolute length measurement ; thermal expansion ; CTE ; homogeneity |
| Zusammenfassung | Different measurement methods exist for the extraction of the coefficient of thermal expansion (CTE). Among them the observation of the sample length as a function of its temperature is the direct way. In the last decade, the use of phase shifting interferometry in combination with computer-based analysis of interference phase maps drastically improved interferometrical length measurements. In addition to the observation of the length itself, such measurements allow the extraction of a length topography L(x,y) of the sample as shown in this paper. From the behaviour of the length topography at different temperatures an upper limit of CTE-homogeneity can be obtained. It is shown in which way disturbing influences can be removed so that uncertainties of L(x,y) in the sub-nm range can be reached for dif-ferent shaped samples. |
