| Zugriffsnummer | 17876 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Meander-shaped micro structures produced with a UV laser system |
| Autor(in); Institution |
Siewert, Carsten; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
Löffler, Frank; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
|
| Quelle/Jahr | Laser in manufacturing 2005 : proceedings of the Third International WLT-Conference on Lasers in Manufacturing:(2005), 757 - 761 |
| Herausgeber(in) |
Beyer, Eckhard
|
| ISBN | 3-00-016402-2 |
| Verlag | Stuttgart: AT-Fachverlag |
| Konferenzangaben | Lasers in Manufacturing, Munich, 13-16, June, 2005, Germany |
| Freie Schlagworte | Microstructuring with scanned UV laser beam ; meander-shaped microstructures ; structured thin films |
| Zusammenfassung | In the last few years, diode-pumped solid-state lasers generating ultraviolet pulses in the range of 20 ns, have come into use for micro material processing. One common wavelength for a two-fold frequency-converted Nd:YVO4 system is 355 nm, and typical pulse energies between 10μJ and 250 μJ are used. Results of the optimisation of process parameters are shown in this work and parameters for structuring titanium thin films on glass substrate or copper layers on FR4 are determined within the scope of this investigation. These parameters include pulse energy, beam diameter, pulse repetition rate and beam velocity relative to the material surface. When chosen carefully, they allow micro structures with square edges to be produces in metallic thin films with only a minimum of the typical problems such as thermal material damage or bulging out material at the edge of the structure. The most important methodes for laser structuring in this field of research are the mask projection and the multi-scanning method. The structures which have been produced in our workin accordance with the multi-scanning method have meander shapes (width: approx. 20 μm) and can be used in a great variety of applications for measuring force, temperature ore magnetic fields. |
