| Zugriffsnummer | 17871 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Precision Assembly of Tips for Scanning Probe Microscopes |
| Autor(in); Institution |
Löffler, Frank; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
Meeß, Rudolf; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
Kempe, Matthias; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Danzebrink, Hans-Ulrich; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings of the 5th International Conference of the European Society for Precision Engineering and Nanotechnology, May 8th - May 11th 2005, Montpellier, France: 1 (2005), 105 - 108 |
| Herausgeber(in) |
euspen Headquarters, Bedford
|
| ISBN | 92-990035-0-5 |
| Verlag | Bedford: euspen Headquarters |
| Konferenzangaben | 5th International Euspen Conference, Montpellier, 8-11, May, 2005, France |
| Freie Schlagworte | microassembly ; precision set up ; machine vision |
| Zusammenfassung | Precise assembly of small parts makes high demands on gripping, positioning and assembly techniques. A new procedure for the assembly of tips for scanning probe microscopes is presented, which uses 12 axes for positioning. For inspection, two camera projections are applied, facilitating the indentification of relative position and orientation of workpieces to each other. Special grippers and strategies for safe manipulation of the highly sensitive workpieces are being developed. It is shown that developed manipulating system and strategies lead to reproducible and sufficiently accurate (range of µm) results. |
