| Zugriffsnummer | 17838 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | High-accuracy profile form measurement by a scanning system consisting on an angle sensor and coupled distance sensors |
| Autor(in); Institution |
Gerhardt, Joachim; 8.4, Mathematische Modellierung und Datenanalyse, PTB-Berlin
Geckeler, Ralf D.; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Schulz, Michael; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Elster, Clemens; 8.4, Mathematische Modellierung und Datenanalyse, PTB-Berlin
|
| Quelle/Jahr | Optical measurement systems for industrial inspection IV: 13.-17. June 2005, Munich, Germany:(2005), 385 - 392 |
| Schriftenreihe | Proceedings of SPIE: 5856 |
| ISBN | 0-8194-5856-2 |
| DOI | |
| Verlag | Bellingham, Wash.: SPIE |
| Konferenzangaben | Optical measurement systems for industrial inspection IV, Munich, 13-17, June, 2005, Germany |
| Zusammenfassung | A scanning system consisting of an angle sensor and coupled distance sensors is used for high-accuracy profile form measurements of optical surfaces. This system allows both scanning stage errors and systematic errors of the distance sensors to be estimated. Additionally, a high lateral resolution is achieved. The optical surface profile is reconstructed from the measurements made by the angle and distance sensors by application of least-squares. A test set-up is presented and the results of optical form measurements are shown. |
Zitierung
Gerhardt, J., Geckeler, R. D., Schulz, M., & Elster, C. (2005). High-accuracy profile form measurement by a scanning system consisting on an angle sensor and coupled distance sensors. Optical measurement systems for industrial inspection IV, Munich, 13-17, June, 2005, Germany. https://doi.org/10.1117/12.612492