| Zugriffsnummer | 17818 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Prototypes of new nanoscale CD-standards for high resolution optical microscopy and AFM |
| Autor(in); Institution |
Huebner, U.; Institute for Physical High Technology, Jena, GERMANY
Morgenroth, W.; Institute for Physical High Technology, Jena, GERMANY
Boucher, R.; Institute for Physical High Technology, Jena, GERMANY
Meyer, H.G.; Institute for Physical High Technology, Jena, GERMANY
Sulzbach, TH.; NanoWorld Services GmbH, Erlangen, GERMANY
Brendel, B.; Leica Microsysteme GmbH, Jena, GERMANY
Mirandé, Werner; PTB-Braunschweig, retired staff
Buhr, Egbert; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Ehret, Gerd; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Fries, Th.; FRT GmbH, Bergisch-Gladbach, GERMANY
Kunath-Fandrei, G.; Carl Zeiss Jena GmbH, Jena, GERMANY
Hild, R.; Hochschule für Technik, Wirtschaft und Kultur Leipzig, Leipzig, GERMANY
|
| Quelle/Jahr | Proceedings of the 5th International Conference of the European Society for Precision Engineering and Nanotechnology, May 8th - May 11th 2005, Montpellier, France: 1 (2005), 185 - 188 |
| Herausgeber(in) |
Chevrier, F.
|
| ISBN | 92-990035-0-5 |
| Verlag | Montpellier: Impr. PAP |
| Konferenzangaben | 5th International Conference of the European Society for Precision Engineering and Nanotechnology, Le Corum-Montpellier, 8-11, May, 2005, France |
| Zusammenfassung | We are going to develop new linewidth standards on the nanometre scale for use in UV microscopy (UVM), confocal laser-scanning microscopy (CLSM) and atomic force microscopy (AFM). Different prototypes containing very high resolution patterns have been fabricated and initially evaluated using state-of-the-art UVM, CLSM and AFM equipment. |
Zitierung
Huebner, U., Morgenroth, W., Boucher, R., Meyer, H., Sulzbach, T., Brendel, B., Mirandé, W., Buhr, E., Ehret, G., Fries, T., Kunath-Fandrei, G., & Hild, R. (2005). Prototypes of new nanoscale CD-standards for high resolution optical microscopy and AFM. 5th International Conference of the European Society for Precision Engineering and Nanotechnology, Le Corum-Montpellier, 8-11, May, 2005, France.