| Zugriffsnummer | 17705 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Metrological large range scanning force microscope applicable for traceable calibration of surface textures |
| Autor(in); Institution |
Dai, Gaoliang; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Pohlenz, Frank; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Danzebrink, Hans-Ulrich; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Xu, Min; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Hasche, Klaus; 5, Fertigungsmesstechnik, PTB-Braunschweig
Wilkening, Günter; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
|
| Quelle/Jahr | Nanoscale calibration standards and methods : dimensional and related measurements in the micro- and nanometre range:(2005), 73 - 92 |
| Herausgeber(in) |
Wilkening, Günter; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Koenders, Ludger; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
|
| ISBN | 3-527-40502-X ; 978-3-527-40502-2 |
| Verlag | Weinheim: Wiley-VCH |
| Konferenzangaben | 2nd Seminar on Nanoscale Calibration Standards and Methods, Braunschweig, 25-26, March, 2004, Germany |
| Freie Schlagworte | Large range scanning force microscope ; metrological scanning force microscopy ; nano positioning stage ; optical interferometer ; piezoactuator ; capacitive sensor ; digital ; signal processing ; nanometer-scale structures |
| Zusammenfassung | PTB has set up a metrological large range scanning force microscope (LR-SFM) aiming for versatile traceable calibration of surface textures. The instrument is designed based on scanning sample principle with a fixed SFM head presently working in contact mode. Several special design aspects are carefully implemented in this instrument in order to enhance its performance: (1) A dual-stage positioning system is designed to scan samples. This dual-stage system consists of a stacked ball bearing mechanical stage, referred to as a nano measuring machine (NMM), and a compact z-axis piezoelectric positioning stage (compact z-stage). During measurements the compact z-stage, with its high mechanical resonance frequency (>20 KHz), is responsible for the rapid motion while the NMM simultaneously makes slower movements over a larger motion range. In such a way, the LR-SFM can make measurements with both a high measurement speed (up to 50 μm/s) and a large measurement volume (25 mm × 25 mm × 5 mm along the x-, y-, and z-directions). (2) The design obeys the Abbe principle. The Abbe error, which is a dominant error source in most precision dimensional measurement instruments, is reduced to a minimum. (3) The direct traceability of the instrument is achieved by using interferometric position measurements. (4) Flexible measurement strategies are implemented in the software and hardware. The LR-SFM is able to perform large area imaging or profile scanning directly without stitching small scanned images. Selected measurement results obtained on a 2D grating and on a micro roughness standard are presented. |
Zitierung
Dai, G., Pohlenz, F., Danzebrink, H.-U., Xu, M., Hasche, K., & Wilkening, G. (2005). Metrological large range scanning force microscope applicable for traceable calibration of surface textures. 2nd Seminar on Nanoscale Calibration Standards and Methods, Braunschweig, 25-26, March, 2004, Germany.