| Zugriffsnummer | 17702 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Towards a nano CMM for bridging the nano and micro world of surface measurements |
| Autor(in); Institution |
Dai, Gaoliang; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Pohlenz, Frank; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Danzebrink, Hans-Ulrich; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Wilkening, Günter; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings of the 5th International Conference of the European Society for Precision Engineering and Nanotechnology, May 8th - May 11th 2005, Montpellier, France: 1 (2005), 197 - 200 |
| Herausgeber(in) |
Chevrier, F.
|
| ISBN | 92-990035-0-5 |
| Verlag | Montpellier: Impr. PAP |
| Konferenzangaben | Proceedings of the 5th International conference and 7th annual general meeting of euspen, Montpellier, 8-11, May, 2005, France |
| Freie Schlagworte | range scanning probe microscope ; metrological stylus profilometer ; calibration tasks ; topography measurement |
| Zusammenfassung | True three-dimensional or quasi three-dimensional calibrations of micro and nano structures are urgently required for setting up the quality assurance system for precision engineering.The research works at PTB towards a nano CMM have been undertaken in three steps: the development of a large range scanning probe microscope (SPM), a metrological stylus profilometer and new three-dimensional nano probes. This paper gives an overview about the designed instruments, their application for measurement and calibration tasks and efforts for bridging the nano and micro world of surface measurements. |
Zitierung
Dai, G., Pohlenz, F., Danzebrink, H.-U., & Wilkening, G. (2005). Towards a nano CMM for bridging the nano and micro world of surface measurements. Proceedings of the 5th International conference and 7th annual general meeting of euspen, Montpellier, 8-11, May, 2005, France.