| Zugriffsnummer | 17698 |
| Dokumenttyp | Zeitschriftenartikel |
| Sprache | Englisch |
| Titel | Product surfaces in precision engineering, microengineering and nanotechnology |
| Autor(in); Institution |
De Chiffre, L.; Technical University of Denmark, Department of Manufacturing Engineering and Management, Lyngby, DENMARK
Kunzmann, Horst; PTB-Braunschweig, retired staff
Peggs, G. N.; National Physical Laboratory (NPL), Teddington, UK
Lucca, D. A.; Oklahoma State University, School of Mechanical and Aerospace Engineering, Stillwater, USA
|
| Quelle/Jahr | Dimensional and temperature metrology. MAPAN: 20 (2005), 2, 115 - 123 |
| ISSN | 0970-3950 |
| Verlag | New Delhi: Metrology Society of India |
| Zusammenfassung | This paper is an excerpt from a recently published CIRP Key-Note paper on surfaces in Precision Engineering, Microengineering and Nanotechnology [1]. It is focussed on the relevance of surface metrology at the micrometric and nanometric length scales. The applied measurement technologies are strongly dependent from the functional requirements on those surfaces. Examples of surfaces obtained with precision engineering, microengineering and nanotechnology are mentioned, encompassing surfaces in computers, MEMS, biomedical systems, light and X-ray optics, as well as in chemical systems. Surface properties at micro and nanoscale are considered, including geometry as well as physical and chemical properties. Manufacturing processes with respect to surface fabrication, encompassing conventional machining, microfabrication and nanomanipulation are only briefly mentioned. Further development in surface metrology at micro and nanoscale are strongly required for future progress of Precision Engineering, Microengineering, and Nanotechnology; and their fundamental importance can not be overestimated. [1] L. De Chiffre, H. Kunzmann, G. N. Peggs and D. A. Lucca: Surfaces in Precision Engineering, Microengineering and Nanotechnology. In: Annals of the CIRP, 52(2) (2003) 561-577 |
