| Zugriffsnummer | 17692 |
| Dokumenttyp | Zeitschriftenartikel |
| Sprache | Englisch |
| Titel | Interferometric length measurement |
| Autor(in); Institution |
Yacoot, Andrew; National Physical Laboratory (NPL), Teddington, UK
Downes, Mike; Interferomet Ltd., Midhurst, West Sussex, UK
Flügge, Jens; 5.2, Längen- und Winkelteilungen, PTB-Braunschweig
|
| Quelle/Jahr | Dimensional and temperature metrology. MAPAN - Journal of Metrology Society of India: 20 (2005), 2, 99 - 114 |
| Herausgeber(in) |
Wäldele, Franz; 5.3, Koordinatenmesstechnik, PTB-Braunschweig
Fischer, Joachim; 7.4, Temperatur, PTB-Berlin
|
| ISSN | 0970-3950 |
| Verlag | New Delhi: Metrology Society of India |
| Freie Schlagworte | interferometer ; laser interferometer ; semiconductor |
| Zusammenfassung | Laser interferometers are flexible and powerfull instruments for the measurement of displacement. Owing to the high cost of frequency stabilised lasers and need to determine the refractive index of air when making measurements, interferometers are mainly used for high precision two dimensional measurements in semiconductor industry and for primary measurements with a direct link to the definition of the metre. However laser interferometers are also used for measurement of large distances where encoders are often too unmanageable and for special applications such as laser trackers that measure in three dimensions. This contribution gives an overview of various laser interferometers and discusses the main sources of uncertainty. Examples for the use of interferometeres are given and the principle and use of X-ray interferometers is also described. |
