| Zugriffsnummer | 17646 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Traceable probing with an AFM |
| Autor(in); Institution |
Dirscherl, Kai; 5.2, Längen- und Winkelteilungen, PTB-Braunschweig
Koops, K. R.; Netherlands Meetinstituut, Van Swinden Laboratorium (NMI-VSL), Delft, THE NETHERLANDS
|
| Quelle/Jahr | Nanoscale calibration standards and methods : dimensional and related measurements in the micro- and nanometre range:(2005), 95 - 108 |
| Herausgeber(in) |
Wilkening, Günter; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Koenders, Ludger; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
|
| ISBN | 3-527-40502-X ; 978-3-527-40502-2 |
| Verlag | Weinheim: Wiley-VCH |
| Konferenzangaben | Seminar NanoScale 2004 - 6th Seminar on Quantitative Microscopy (QM) and 2nd Seminar on Nanoscale Calibration Standards and Methods, Braunschweig, 25-26, March, 2004, Germany |
| Freie Schlagworte | AFM ; atomic force microscope ; nanometer ; nanotechnology ; interferometer |
| Zusammenfassung | The need for fast and accurate inspection of small sample features is eminent considering the developments in micro and nanotechnology. The atomic force microscope (AFM) offers extreme resolution and even accuracy when properly calibrated (R. Breil et al, Precision Engineering 26 (3) 296-305 (2002)), but the principle of operation results in inherently slow acquisition of the measurement data. At the Van Swinden Laboratorium of the Nederlands Meetinstituut in the Netherlands, we have constructed a traceable AFM using a stand alone AFM head, a 3D translation stage and an accurate 3D laser interferometer system. Nanometer measurement uncertainty is achieved in the entire scanning volume of 100 μm × 100 μm × 20 μm. Apart from providing direct traceability to the SI unit of length, we have added the possibility of probing the sample in arbitrary positions in contrast to an AFMs ordinary scanning process. Only the areas of interest are measured with maximum accuracy in this probing mode while the rest of he surface is ignored. This speeds up the acquisition of relevant data and enables the use of an AFM as a nanometer coordinate measuring machine. In order to achieve this freedom of positioning, a new control algorithm is developed that features feedforward-feedback control using the information of the laser interferometers. The measurement signals can he sampled at 50 kHz, which ensures control in real-time. This paper focuses on the key points of the ARM design as weIl as the control algorithm and shows first results. |
