Micro force sensor with piezoresistive amorphous carbon strain gauge

Peiner, Erwin; Tibrewala, Arti; Bandorf, Ralf; Biehl, S.; Lüthje, Holger; Doering, Lutz

doi:https://doi.org/10.1016/j.sna.2005.11.059

Zugriffsnummer	17403
Dokumenttyp	Konferenzartikel in Zeitschrift
Sprache	Englisch
Titel	Micro force sensor with piezoresistive amorphous carbon strain gauge
Autor(in); Institution	Peiner, Erwin; TU Braunschweig, IHT, Braunschweig, GERMANY Tibrewala, Arti; TU Braunschweig, IHT, Braunschweig, GERMANY Bandorf, Ralf; Fraunhofer-Institut für Schicht- und Oberflächentechnik (IST), Braunschweig, GERMANY Biehl, S.; Fraunhofer-Institut für Schicht- und Oberflächentechnik (IST), Braunschweig, GERMANY Lüthje, Holger; Fraunhofer-Institut für Schicht- und Oberflächentechnik (IST), Braunschweig, GERMANY Doering, Lutz; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Quelle/Jahr	Sensors and Actuators A: 130/131 (2006), 75 - 82
ISSN	0924-4247
DOI	https://doi.org/10.1016/j.sna.2005.11.059
Verlag	Amsterdam: Elsevier
Konferenzangaben	13th International Conference on Solid State Sensors, Actuators and Microsystems, Seoul, 05-09, June, 2005, Korea
Freie Schlagworte	Amorphous carbon ; piezoresistive gauge factor ; bulk silicon micromachining ; micro force sensor
Zusammenfassung	In this contribution we report for the first time on the successful integration of amorphous carbon (a-C) as a piezoresistive strain gauge into a silicon micro cantilever force sensor. Sputter-deposited a-C layers showing excellent tribological properties contain a percentage of nearly 20% of tetrahedral sp³ carbon bonds as observed by optical absorption and Raman spectroscopy. Temperature-dependent transport measurements revealed hopping conduction between conducting sp² carbon sites embedded in the insulating skeletal matrix of sp³ bonds. Changing their distance by strain a change of resistivity could be expected, which was investigated with layers sputter-deposited on a silicon membrane and structured by the lift-off technique using photo resist. Cantilevers comprising a-C strain gauges were etched out of this membrane using tetra methyl ammonium hydroxide (TMAH) and potassium hydroxide (KOH) solutions in a bulk silicon micromachining process. Realised prototypes were tested by applying a variable load to the cantilever free end. We found linear characteristics of the strain gauge resistance versus the applied force in the range of 0 to ± 600 μN revealing a piezoresistive gauge factors of a-C within 36-46.

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Peiner, E., Tibrewala, A., Bandorf, R., Biehl, S., Lüthje, H., & Doering, L. (2006). Micro force sensor with piezoresistive amorphous carbon strain gauge. Sensors and Actuators A, 130/131, 75–82. https://doi.org/10.1016/j.sna.2005.11.059

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