| Zugriffsnummer | 17201 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Scanning probe microscopy - from atomic scale to millimeter |
| Autor(in); Institution |
Koenders, Ludger; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
|
| Quelle/Jahr | Dynamic calibration and measurement : proceeding[s] of CIMM-PTB Seminar 2003:(2003), 1 - 10 |
| Herausgeber(in) |
Changcheng Institute of Metrology and Measurement, CHINA
|
| Verlag | [s.l.]: |
| Konferenzangaben | Symposium on Dynamic Calibration and Measurement between PTB and CIMM, Beijing, 27-28, October, 2003, China |
| Zusammenfassung | Nanotechnology covers fields like - nano scale materials - ultra thin layers - ultra precise manufacturing - nano structuring - nano analytics. In contrast to the macroscopic world, however, dimension and function are tightly linked together and the measurement of properties presupposes the measurement of dimension. Because of this, especially the Scanning Probe Microscope family has proven its suitability. The measurement tasks range from geometry (distance, width, diameter, depth, form, texture, roughness, thickness of layer) to hardness and from magnetical, electrical, optical, chemical properties to molecular forces. Although Scanning Probe Microscopes (SPM) are versatile instruments, improvements are necessary, like enlarging measurement or positioning ranges, increasing speed, improving understanding of probe-sample interaction. For the calibration of such instruments and their industrial application a large variety of standards have been developed. To extent the measurement range of such instruments from the micrometer scale to the millimetre scale is a great task. Different instruments have been realized. |
