| Zugriffsnummer | 17166 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Systematic characterization of SPM systems [poster] |
| Autor(in); Institution |
Dziomba, Thorsten; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Koenders, Ludger; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Danzebrink, Hans-Ulrich; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Wilkening, Günter; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
|
| Quelle/Jahr | Scanning Probe Microscopy - 2004 : international workshop ; proceedings:(2004), 230 - 235 |
| Herausgeber(in) |
Gaponov, S. V.
|
| Verlag | Nizhny Novgorod: Institute for Physics of Microstructures, RAS |
| Konferenzangaben | Scanning Probe Microscopy 2004 (SPM-2004), Nizhny Novgorod, 02-06, May, 2004, Russia |
| Freie Schlagworte | Scanning probe microscopy ; Calibration ; Calibration guideline ; Instrumentation ; Standardization |
| Zusammenfassung | With the increasing use of Scanning Probe Microscopes (SPMs) as quantitative measurement instruments, the demand for standardized calibration routines for this type of instruments rises. A number of physical transfer standards suited for SPMs have already been developed for this purpose and are commercially available. Up to now, there is no generally accepted guideline on how to perform SPM calibrations. This paper therefore aims to discuss a possible scheme for the quantitative characterization of SPM systems. Special attention needs to be devoted to the measurement conditions as they play an extra-ordinarily crucial role in SPM operation, e. g. susceptibility towards ambient sound, air turbulence, vibrations of the building, presence of staff and temperature. The intrinsic errors of the system - i. e. electronic and mechanical noise, drift, hysteresis and guidance errors - set an ultimate limit for a system’s stability. They might be largely determined by using flatness standards. Furthermore, transfer standards allow to calibrate the vertical and both lateral axes. Depending on the scanner, it might be reasonable to determine individual correction factors - and possibly additional correction functions to compensate image distortions - for different settings, e. g. for different scan ranges and scan speeds (lateral) resp. step heights (vertical). Some standards - partly developed in co-operation with PTB - will be presented and discussed. Applications such as edge steepness investigations or critical dimension measurements (e. g. on photomask) demand a good knowledge of the probe’s geometry and thereby rely on suitable tip characterization methods. To finally calculate the uncertainty of the actual measurement on an object, all contributions to the uncertainty need to be assessed. To illustrate most aspects of SPM calibration, several practical examples are added on the poster. |
