| Zugriffsnummer | 17147 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Height and pitch at nanoscale - how traceable is nanometrology ? |
| Autor(in); Institution |
Koenders, Ludger; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Meli, F.; Swiss Federal Office of Metrology and Accreditation, Bern, SWITZERLAND
|
| Quelle/Jahr | Nanoscale calibration standards and methods : dimensional and related measurements in the micro- and nanometre range:(2005), 205 - 219 |
| Herausgeber(in) |
Wilkening, Günter; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Koenders, Ludger; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
|
| ISBN | 3-527-40502-X ; 978-3-527-40502-2 |
| Verlag | Weinheim: Wiley-VCH |
| Konferenzangaben | NanoScale 2004, 6th Seminar on Qualtitative Microscopy (QM) and 2nd Seminar on Nanoscale Calibration Standards and Methods, Braunschweig, 25-26, March, 2004, Germany |
| Zusammenfassung | Three international comparisons ( NANO2, NANO3, and NANO4) were performed in the field of nanometrology between 1999 and 2002. Two of them, NANO2 (step height) and NAO4 (1D pitch),included scanning probe microscopes (SPM ) for thr first time. It was therefor important for the SPMs to perform successfully in order to show their full potential for dimensional metrology. Other techiques used in the comparisons were optical diffraction and optical microscopy for pitch measurements and stylus instruments and interference microscopesfor step- height measurement. We present results of these two comparisons and compare the results and the uncertainties obtained by SPM with those of the other techniques. Both comparisons showed that most of the participants were able to make reasonable estimates of measurement uncertainties. The ranges of uncertainties estimated were in a small range for step- height measurements whereas they varied by factor of 660 for the pitch measurements. |
