| Zugriffsnummer | 16951 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Measurement of high resolution interferential encoders using the PTB nanometer comparator |
| Autor(in); Institution |
Flügge, Jens; 5.2, Längen- und Winkelteilungen, PTB-Braunschweig
Köning, Rainer; 5.2, Längen- und Winkelteilungen, PTB-Braunschweig
Bosse, Harald; 5.2, Längen- und Winkelteilungen, PTB-Braunschweig
|
| Quelle/Jahr | Nanoscale calibration standards and methods : dimensional and related measurements in the micro- and nanometre range:(2005), 404 - 409 |
| Herausgeber(in) |
Wilkening, Günter; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Koenders, Ludger; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
|
| ISBN | 3-527-40502-X ; 978-3-527-40502-2 |
| Verlag | Weinheim: Wiley-VCH |
| Konferenzangaben | NanoScale 2004, Seminar on Quantitative Microscopy and Nanoscale Clibration Standards and Methods, Braunschweig, 25-26, March, 2004, Germany |
| Zusammenfassung | The PTB nanometer length comparator was developed in cooperation with the Dr. Johannes Heidenhain GmbH and the Werth Messtechnik GmbH. The comparator was designed to be applied for calibrations of graduations on objects like line scales and photomasks and for calibrations of length measurement systems like displacement probes, interferometers and incremental linear encoders. The maximum translation range of the 1D comparator is 610 mm. In this paper measurements on high resolution incremental linear encoders are presented, which were performed to verify the current measurement performance of the nanometer comparator. |
Zitierung
Flügge, J., Köning, R., & Bosse, H. (2005). Measurement of high resolution interferential encoders using the PTB nanometer comparator. NanoScale 2004, Seminar on Quantitative Microscopy and Nanoscale Clibration Standards and Methods, Braunschweig, 25-26, March, 2004, Germany.