| Zugriffsnummer | 16211 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Recent activities of the PTB in the field of dimensional nanometrology |
| Autor(in); Institution |
Bosse, Harald; 5.2, Längen- und Winkelteilungen, PTB-Braunschweig
Mirandé, Werner; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Wilkening, Günter; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Hasche, Klaus; 5, Fertigungsmesstechnik, PTB-Braunschweig
|
| Quelle/Jahr | 11e Congrès International de Métrologie: Actes des conférences = 11th International Metrology Congress: Proceedings:(2003) |
| Availability | [CD-ROM] ; file name: 167.pdf |
| ISBN | 2-915416-00-1 |
| Verlag | Paris: Collège Français de Métrologie |
| Konferenzangaben | 11e Congrès International de Métrologie ; 11th International Metrology Congress, Toulon, 20-23, Octobre, 2003, France |
| Zusammenfassung | This contribution will give an overview of recent developments and achievements of the PTB in the field of dimensional nanometrology. Examples of activities are given and discussed in the light of corresponding driving requirements from industry as well as from basic science. In particular, the dimensional metrology specifications in semiconductor production and their impact on some of PTBs activities in nanometrology are described. In addition, PTBs involvement in recent international comparisons in the important field of nanometrology will be addressed. |
