| Zugriffsnummer | 16006 |
| Dokumenttyp | Zeitschriftenartikel |
| Sprache | Englisch |
| Titel | From nanometre to millimetre: a feasibility study of the combination of scanning probe microscopy and combined optical and x-ray interferometry |
| Autor(in); Institution |
Yacoot, Andrew; National Physical Laboratory (NPL), Teddington, UK
Koenders, Ludger; 5.12, Mikro- und Nanotopographie, PTB-Braunschweig
|
| Quelle/Jahr | Measurement science and technology: 14 (2003), N59 - N63 |
| ISSN | 0957-0233 |
| URL | |
| Verlag | Bristol: IOP Publishing |
| Freie Schlagworte | nanometrology ; calibration ; scanning probe microscopy ; x-ray interferometry ; non-linearity ; lateral calibration |
| Zusammenfassung | This feasibility study investigates the potential combination of an x-ray interferometer and optical interferometer as a one-dimensional long range high resolution scanning stage for an atomic force microscope (AFM) in order to overcome the problems on non-linearity associated with conventional AFMs and interferometers. Preliminary results of measurements of the uniformity of the period of a grating used as a transfer standards show variations in period at the nanometre level. |
