| Zugriffsnummer | 16003 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Development and investigation of a calibration method for the depth measuring system of a nanoindentation instrument |
| Autor(in); Institution |
Herrmann, Konrad; 5.102, Härtemessung, PTB-Braunschweig
Li, Zhi; 5.102, Härtemessung, PTB-Braunschweig
Pohlenz, Frank; 5.12, Mikro- und Nanotopographie, PTB-Braunschweig
Menelao, Febo; 5.102, Härtemessung, PTB-Braunschweig
|
| Quelle/Jahr | Euspen : international topical conference on precision engineering, micro technology, measurement techniques and equipment : proceedings: 2 (2003), 395 - 398 |
| Herausgeber(in) |
Weck, Manfred; Fraunhofer Institute for Production Technology IPT, Aachen, GERMANY
Kunzmann, Horst; Präsidium, MP, PTB-Braunschweig
|
| ISBN | 3-926832-30-4 |
| Verlag | Voerde: Rhiem |
| Konferenzangaben | Euspen, Aachen, 19-20, May, 2003, Germany |
| Freie Schlagworte | Nanoindentation instrument ; Calibration method ; Depth measuring system ; Laser interferometer |
| Zusammenfassung | Within nanotechnology the nanoindentation method developed to an indispensable tool of quality assurance. This method enables to determine the mechanical properties of thin layers. For a high quality of these layers the calibration of the nanoindentation instruments is necessary. The calibration of the depth measuring system in nanoindentation instruments is especially important. The paper reports about the development, investigation and results of a calibration method for the depth measuring system of a nanoindentation instrument. As calibration device a multi-pass plane mirror laser interferometer with sub-nanometric capability is used. The calibration set-up and the measures applied in order to eliminate or to avoid environmental disturbances are discussed. |
