| Zugriffsnummer | 15973 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Laser radiometry for excimer lasers at 193 nm and 157 nm |
| Autor(in); Institution |
Kück, Stefan; 4.11, Radiometrische Einheiten, PTB-Braunschweig
Liegmann, Klaus; 4.1, Licht und Strahlung, PTB-Braunschweig
Möstl, Klaus; 4.11, Radiometrische Einheiten, PTB-Braunschweig
Brandt, Friedhelm; 4.11, Radiometrische Einheiten, PTB-Braunschweig
Metzdorf, Jürgen; 4.1, Licht und Strahlung, PTB-Braunschweig
|
| Quelle/Jahr | Instruments and standard test procedures for laser beam and optics characterization : CHOCOLAB II ; broschure to the final presentation of the EUREKA Project EU-2359:(2003), 3 - 11 |
| Herausgeber(in) |
Nickel, Detlef; Universität Stuttgart, Institut für Strahlwerkzeuge, Stuttgart, GERMANY
|
| Verlag | Düsseldorf: VDI-Technology Center |
| Konferenzangaben | Laser 2003, World of Photonics, Munich, 24-25, June, 2003, Germany |
| Freie Schlagworte | laser radiometry ; calibration ; excimer laser ; 157 nm ; 193 nm |
| Zusammenfassung | Setups for the measurement and calibration of laser power at the excimer laser wavelengths of 193 nm and 157 nm were realized. At 193 nm a primary standard detector named LM4 was completely characterized with respect to the damage threshold, the determination of the effective spectral reflectance, the coefficients for the temperature and power dependence as well as the absolute responsivity. This standard detector is linked to the calibration chain established at the Physikalisch-Technische Bundesanstalt (PTB), the German National Metrology Institute. An uncertainty analysis according to the "Guide to the Expression of Uncertainty in Measurement" was performed. Two transfer detectors were linked to the LM4 at the wavelength of 193 nm allowing calibrations with a relative expanded uncertainty (k = 2) ≥ 0.7 %. Maximum average power, for which calibrations at 193 nm can be performed, is 3 W at a repetition rate of 200 Hz. At 157 nm a vacuum-feasible setup, which also allows the use of different gas atmospheres, was established and is now under test. The standard detector (LM8) for this wavelength, a gold-coated copper cone detector in a vacuum-feasible housing, was characterized according to its temperature and power dependence. In the nearest future, this detector will also be linked to the PTB calibration chain. |
