| Zugriffsnummer | 15934 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Laser radiometry for UV-lasers at 193 nm |
| Autor(in); Institution |
Kück, Stefan; 4.11, Radiometrische Einheiten, PTB-Braunschweig
Liegmann, Klaus; 4.1, Licht und Strahlung, PTB-Braunschweig
Möstl, Klaus; 4.11, Radiometrische Einheiten, PTB-Braunschweig
Brandt, Friedhelm; 4.11, Radiometrische Einheiten, PTB-Braunschweig
Metzdorf, Jürgen; 4.1, Licht und Strahlung, PTB-Braunschweig
|
| Quelle/Jahr | Laser-induced damage in optical materials: 2002 and 7th International Workshop on Laser Beam and Optics Characterization ; 34th Boulder Damage Symposium, 16 - 18 September 2002, Boulder, Colorado ; 7th International Workshop on Laser Beam and Optics Characterization, 18 - 19 September 2002, Boulder, Colorado ; proceedings:(2003), 645 - 655 |
| Schriftenreihe | Proceedings of SPIE: 4932 |
| Herausgeber(in) |
Exarhos, Gregory J.
Giesen, Adolf
|
| ISSN | 0277-786X |
| ISBN | 0-8194-4727-7 |
| Verlag | Bellingham, Wash.: SPIE |
| Konferenzangaben | 7th International Workshop on Laser Beam and Optics Characterization, Boulder, Colo., 18-20, September, 2002, USA |
| Freie Schlagworte | Calibration at 193nm ; Excimer laser |
| Zusammenfassung | A setup for the measurement and calibration of laser power at the Excimer laser wavelength of 193nm was realized. The investigations include the measurement of damage threshold and the determination of the effective spectral reflectance of the material used for the primary detector standard (LM4). The results of these studies allow the complete characterization of the LM4 detector including an uncertainty analysis according to the "Guide to the Expression of Uncertainty in Measurement". The LM4 was linked to the calibration chain established at the PTB. Furthermore three transfer detectors were linked to the LM4. Calibrations can be performed down to 193nm with a relative expanded uncertainty (k = 2) below 1.6%. An outlook for the calibration of laser power at 157nm will be given. |
