| Zugriffsnummer | 15849 |
| Dokumenttyp | Zeitschriftenartikel |
| Sprache | Englisch |
| Titel | Calibrated waveform measurement with high-impedance probes |
| Autor(in); Institution |
Kabos, Pavel; National Institute of Standards and Technology (NIST), Boulder, CO, USA
Reader, Howard Charles; National Institute of Standards and Technology (NIST), Boulder, CO, USA; University of Stellenbosch, Electrical and Electronic Engineering Department, Matieland, SOUTH AFRICA
Arz, Uwe; 2.22, Hochfrequenzmesstechnik, PTB-Braunschweig
Williams, Dylan F.; National Institute of Standards and Technology (NIST), Boulder, CO, USA
|
| Quelle/Jahr | IEEE Transactions on Microwave Theory and Techniques: 51 (2003), 2, 530 - 535 |
| ISSN | 0018-9480 |
| Verlag | New York, NY: IEEE |
| Freie Schlagworte | calibration ; high-impedance probe ; on-wafer measurement ; waveform measurement |
| Zusammenfassung | We develop an on-wafer waveform calibration technique that combines a frequency-domain mismatch correction to account for the effects of the probe on the measurement with an oscilloscope calibration. The mismatch correction is general and can be applied to any type of microwave probe, including scanning and internal-node probes for noninvasive integrated-circuit tests. We show that, for the commercial high-impedance probe we used, this calibration approach allows accurate on-wafer waveform reconstruction for a variety of probe ground configurations. |
