Zugriffsnummer 15436
Dokumenttyp Zeitschriftenartikel
Peer Review unbekannt
Sprache Englisch
Titel Experimental study of Ar+ beams extracted from a cold or hot reflex discharge ion source (CHORDIS)
Autor(in); Institution
Ratschko, Dirk; 1.11, Masseneinheit, PTB-Braunschweig; Universität Osnabrück, Fachbereich Physik, Osnabrück, GERMANY
Zhou, Baoguo G.; National Institute of Metrology, Beijing, CHINA
Knolle, Dieter; 1.11, Masseneinheit, PTB-Braunschweig
Gläser, Michael; 1.11, Masseneinheit, PTB-Braunschweig
Quelle/Jahr Nuclear Instruments and Methods in Physics Research B: 119 (1996), 549 - 554
ISSN 0168-583X
Verlag Amsterdam [u.a.]: Elsevier
Freie Schlagworte ion source ; ion beam
Zusammenfassung An Ar+ ion beam with an ion energy up to 20 keV was investigated as function of the parameters of a CHORDIS ion source with the aim of obtaining a high-quality beam. The beam profile and the total beam current measured with a multi-segmented Faraday cup under non-focusing and focusing conditions. For beam diagnostics, we measured the dependencies of the discharge current, the total beam current and the ion beam current density on the extraction voltage, on the screening voltage, on the filament current and on the gas inlet pressure. Two-dimensional beam profiles were measured under non-focusing and focusing conditions, respectively.

Zitierung

Ratschko, D., Zhou, B. G., Knolle, D., & Gläser, M. (1996). Experimental study of Ar⁺ beams extracted from a cold or hot reflex discharge ion source (CHORDIS). Nuclear Instruments and Methods in Physics Research B, 119, 549–554.

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