| Zugriffsnummer | 15423 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | In Situ optical probe interferometer for measuring displacement of nanoindenter: A configuration |
| Autor(in); Institution |
Li, Zhi; 5.102, Härtemessung, PTB-Braunschweig
Herrmann, Konrad; 5.102, Härtemessung, PTB-Braunschweig
Pohlenz, Frank; 5.12, Mikro- und Nanotopographie, PTB-Braunschweig
|
| Quelle/Jahr | Optomechatronic systems III:(2002), 197 - 204 |
| Schriftenreihe | Proceedings of SPIE: 4902 |
| ISSN | 0277-786X |
| ISBN | 0-8194-4689-0 |
| Verlag | Bellingham, Wash.: SPIE |
| Konferenzangaben | Optomechatronic Systems III, Stuttgart, 12-14, November, 2002, Germany |
| Freie Schlagworte | Nanoindentation instrument ; depth sensing indentation ; calibration ; laser interferometer ; single-frequency interferometry ; nanometric accuracy |
| Zusammenfassung | Instrumented indentation testing in the nano-range with "nanoindentation instrument" is playing an increasing role in the characterization of the mechanical properties of thin layers used in surface technology, microelectronics, micromechanics, optics etc. Several works concerning calibration of nanoindentation instruments were published in the last years, and the calibration of the performance of the depth sensing system in a nanoindentation instrument is now under way. In this paper, an optical probe interferometer for calibrating the depth measuring system in a Hysitron Triboscope has been presented, the principle and configuration of the interferometer are detailed. Error sources in the interferometry and their contribution to the interferometer performance have been discussed, which proves that the newly developed calibration device possesses the capability of sensing displacement with subnanometric capability. |
