| Zugriffsnummer | 15143 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Calibration of reference standards for measurements of the coating thickness |
| Autor(in); Institution |
Ahbe, Thomas; 5.21, Härte und Schichtdicke, PTB-Berlin
Haft, Norbert; 5.21, Härte und Schichtdicke, PTB-Berlin
Hasche, Klaus; 5, Fertigungsmesstechnik, PTB-Braunschweig
Hoffmann, Klaus-Peter; 5.21, Härte und Schichtdicke, PTB-Berlin
Thiele, Kerstin; 5.21, Härte und Schichtdicke, PTB-Berlin
|
| Quelle/Jahr | Metrologija i metrologicno osigurjavane '98 : sbornik dokladi = Metrology and Metrology Assurance '98 : proceedings of the symposium, 8-th National Scientific Symposium with international participation:(1998), 23 - 28 |
| ISBN | 954-438-229-1 |
| Verlag | Sofija: Techn. Univ. |
| Konferenzangaben | 8th National Scientific Symposium with international participation Metrology and Metrology Assurance '98, Sozopol, 14-18, September, 1998, Bulgaria |
| Freie Schlagworte | traceability ; calibration ; standards ; coating thickness |
| Zusammenfassung | The PTB carries out calibrations of reference standards for the coating thickness by methods of topographical and lateral length measurements. The topographical method uses interference-optical and scanning force microscopy (SFM) on samples which are partially coated. The lateral calibration method is applied to scanning electron microscopy (SEM) on cross sections. The paper deals with the progress of the work on investigation and calibration of the measuring devices as well as design and preparation of special reference standards. |
Zitierung
Ahbe, T., Haft, N., Hasche, K., Hoffmann, K.-P., & Thiele, K. (1998). Calibration of reference standards for measurements of the coating thickness. 8th National Scientific Symposium with international participation Metrology and Metrology Assurance '98, Sozopol, 14-18, September, 1998, Bulgaria.