| Zugriffsnummer | 15048 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Applications of calibration comparison in on-wafer measurement |
| Autor(in); Institution |
Arz, Uwe; 2.22, Hochfrequenzmesstechnik, PTB-Braunschweig
Williams, Dylan F.; National Institute of Standards and Technology (NIST), Boulder, USA
|
| Quelle/Jahr | XXVIIth General Assembly of the International Union of Radio Science = XXVIIe Assemblée Générale de L'Union Radio-Scientifique Internationale:(2002) |
| Availability | [CD-ROM] ; file name: p0954.pdf |
| Verlag | Maastricht: URSI |
| Konferenzangaben | URSI XXVIIth General Assembly, Maastricht, 17-24, August, 2002, The Netherlands |
| Freie Schlagworte | on-wafer measurements ; calibration comparison ; scattering parameters ; multiport calibration ; substrate permittivity compensation ; characteristic impedance measurement |
| Zusammenfassung | In this paper we discuss several applications of calibration comparison in on-wafer measurement. This technique can be understood as an abstraction of the well-known two-tier deembedding scheme used in test-fixture characterisation. The applications presented here include the assessment of accuracy of a given on-wafer calibration with respect to a benchmark calibration, the compensation for substrate permittivity in probe-tip calibration, the determination of characteristic impedance in planar transmission line structures, and multiport calibration. |
