| Zugriffsnummer | 14854 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Si-cantilevers with integrated piezo resistive elements as micro force transfer standards [poster] |
| Autor(in); Institution |
Doering, Lutz; 5.101, Mikrosystem-Messtechnik, PTB-Braunschweig
Brand, Uwe; 5.101, Mikrosystem-Messtechnik, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings of the 5th seminar on quantitative microscopy and 1st seminar on nanoscale calibration standards and methods : NanoScale 2001 ; Dimensional measurements in the micro- and nanometre range:(2001), 185 - 192 |
| Schriftenreihe | PTB-Bericht PTB-F-44 |
| Herausgeber(in) |
Hasche, Klaus; 5, Fertigungsmesstechnik, PTB-Braunschweig
Mirandé, Werner; 4.22, Bildanalyse, PTB-Braunschweig
Wilkening, Günter; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
|
| ISSN | 0179-0609 |
| ISBN | 3-89701-840-3 |
| Berichtsnummer | PTB-F-44 |
| Verlag | Bremerhaven: Wirtschaftsverl. NW, Verl. für neue Wissenschaft |
| Konferenzangaben | NanoScale 2001 ; 5th Seminar on Quantitative Microscopy and 1st Seminar on Nanoscale Calibration Standards and Methods, Bergisch-Gladbach, 15-16, November, 2001, Deutschland |
| Freie Schlagworte | cantilever ; force ; measure ; AFM ; silicon ; metrology |
| Zusammenfassung | Nowadays a lot of micro parts are made of soft materials. For the quality control of these parts tactile measurement techniques are applied which might scatch or deform the surface if the probing forces are too high. Furthermore the precise measurement of surface topography is not possible. Thus the exact knowledge of small probing forces is very important. Up to now no force calibration standards are available for stylus instruments, micro- and nano-indentation instruments and coordinate measuring machines. For atomic force microscopes there are calibrated Si-cantilevers commercially available [1]. Si-cantilevers are routinously used in atomic force microscopes for high resolution surface topography measurements. The long time stability of these bending beams and the uncertainty of force measurement has not yet been investigated. First investigations of cantilevers with integrated piezo resistors for the measurement of deflection show that the repeatability of the measured stiffness is about 10 % [2]. Further investigations of the repeatability, stability and signal to noise ratio of the output signal will be presented. An application of this micro force transfer standard measuring the probing forces of a coordinate measuring machine will also be presented. |
Zitierung
Doering, L. & Brand, U. (2001). Si-cantilevers with integrated piezo resistive elements as micro force transfer standards [poster]. NanoScale 2001 ; 5th Seminar on Quantitative Microscopy and 1st Seminar on Nanoscale Calibration Standards and Methods, Bergisch-Gladbach, 15-16, November, 2001, Deutschland.