| Zugriffsnummer | 14836 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Optical roughness measurements with a multiwavelength diode laser interferometer |
| Autor(in); Institution |
Meiners-Hagen, Karl; 5.21, Längenmessmittel, PTB-Braunschweig
Abou-Zeid, Ahmed; 5.21, Längenmessmittel, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings of the 3rd International Conference [and 4th General Meeting of the] European Society for Precision Engineering and Nanotechnology. Vol. 2:(2002), 597 - 600 |
| Herausgeber(in) |
Delbressine, F. L. M.
|
| ISBN | 90-386-2883-8 |
| Verlag | Eindhoven: Universiteitsdr. TU Eindhoven |
| Konferenzangaben | Euspen, Eindhoven, 26-30, May, 2002, The Netherlands |
| Zusammenfassung | Measurements on roughness standards were performed with a multiwavelength diode laser interferometer which was originally designed for surface profile measurement. A comparison of the roughness parameters derived from the interferometer data with the reference values obtained with a stylus instrument exhibit a well agreement within 9% for the averaged parameters like the roughness average Ra. The peak values like Rz, however, are up to 17% smaller than their references values. |
