| Zugriffsnummer | 14835 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Recent developments at the PTB nanometer comparator |
| Autor(in); Institution |
Flügge, Jens; 5.203, Nanometerkomparator, PTB-Braunschweig
Köning, Rainer; 5.203, Nanometerkomparator, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings of the 3rd International Conference [and 4th General Meeting of the] European Society for Precision Engineering and Nanotechnology. Vol. 2:(2002), 589 - 592 |
| Herausgeber(in) |
Delbressine, F. L. M.
|
| ISBN | 90-386-2883-8 |
| Verlag | Eindhoven: Universiteitsdr. TU Eindhoven |
| Konferenzangaben | Euspen, Eindhoven, 26-30, May, 2002, The Netherlands |
| Zusammenfassung | This paper describes recent developments and current status of the PTB nanometer length comparator. The comparator now is equipped with a heterodyne interferometer setup. Due to changes in the interferometer electronics, a higher data acquisition rate and subsequently a better repeatability of the detection of line edges was obtained. The paper also adresses the current situation of green light fiber coupling in vacuum. |
