| Zugriffsnummer | 14834 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Development of a scanning force microscope employing a quartz tuning fork as the force sensor |
| Autor(in); Institution |
Grant, Anthony; Cork Institute of Technology, Cork, IRELAND
Danzebrink, Hans-Ulrich; 5.201, Hochauflösende Antastsysteme, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings of the 3rd International Conference [and 4th General Meeting of the] European Society for Precision Engineering and Nanotechnology. Vol. 2:(2002), 581 - 584 |
| Herausgeber(in) |
Delbressine, F. L. M.
|
| ISBN | 90-386-2883-8 |
| Verlag | Eindhoven: Universiteitsdr. TU Eindhoven |
| Konferenzangaben | Euspen, Eindhoven, 26-30, May, 2002, The Netherlands |
| Zusammenfassung | The high quality factor (Q-factor) of the resonance of a quartz tuning fork has resulted in its wide exploitation as a force sensor in scanning probe microscopy [e.g. 1-3]. We use commercial cantilevers to provide these tuning forks with a sharp tip in order to probe the surface. Furthermore, we demonstrate that amplitude modulation (AM) techniques result in a system response that is too slow for feedback control purpose using these high Q-factors. To this end, we show an adaptation of the system to implement frequency modulation (FM) detection that overcomes this obstacle and facilitates retention of a high system bandwidth. |