Zugriffsnummer 14834
Dokumenttyp Konferenzartikel
Sprache Englisch
Titel Development of a scanning force microscope employing a quartz tuning fork as the force sensor
Autor(in); Institution
Grant, Anthony; Cork Institute of Technology, Cork, IRELAND
Danzebrink, Hans-Ulrich; 5.201, Hochauflösende Antastsysteme, PTB-Braunschweig
Quelle/Jahr Proceedings of the 3rd International Conference [and 4th General Meeting of the] European Society for Precision Engineering and Nanotechnology. Vol. 2:(2002), 581 - 584
Herausgeber(in)
Delbressine, F. L. M.
ISBN 90-386-2883-8
Verlag Eindhoven: Universiteitsdr. TU Eindhoven
Konferenzangaben Euspen, Eindhoven, 26-30, May, 2002, The Netherlands
Zusammenfassung The high quality factor (Q-factor) of the resonance of a quartz tuning fork has resulted in its wide exploitation as a force sensor in scanning probe microscopy [e.g. 1-3]. We use commercial cantilevers to provide these tuning forks with a sharp tip in order to probe the surface. Furthermore, we demonstrate that amplitude modulation (AM) techniques result in a system response that is too slow for feedback control purpose using these high Q-factors. To this end, we show an adaptation of the system to implement frequency modulation (FM) detection that overcomes this obstacle and facilitates retention of a high system bandwidth.

Zitierung

Grant, A. & Danzebrink, H.-U. (2002). Development of a scanning force microscope employing a quartz tuning fork as the force sensor. Euspen, Eindhoven, 26-30, May, 2002, The Netherlands.

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