| Zugriffsnummer | 14204 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Determination of the geometry of various indenter types used for micro- and nanoindentation |
| Autor(in); Institution |
Herrmann, Konrad; 5.12, Mikro- und Nanotopographie, PTB-Braunschweig
Herrmann, Frank; 5.12, Mikro- und Nanotopographie, PTB-Braunschweig
Seemann, Reiner; 8.201, Medizinische Messdatenerfassungssysteme, PTB-Berlin
Hasche, Klaus; 5, Fertigungsmesstechnik, PTB-Braunschweig
|
| Quelle/Jahr | Precision engineering, nanotechnology : proceedings of the Euspen 2nd International Conference, European Society for Precision Engineering and Nanotechnology. Vol. 1:(2001), 436 - 439 |
| Herausgeber(in) |
Balsamo, A.; CNR-IMGC, Torino, ITALY
|
| Verlag | Turin: |
| Konferenzangaben | Euspen 2nd International Conference, Torino, 27-31, May, 2001, Italy |
| Freie Schlagworte | Indenter ; Microindentation ; Nanoindentation ; Indenter geometry ; Calibration ; Scanning Force Microscope |
| Zusammenfassung | This contribution refers to the accuracy of the micro- and nanoindentation test which is predominantly used for the determination of mechanical properties of thin layers. The most important influence factor for the accuracy of the indentation test in this range is the exact knowledge of the used indenter's geometry, especially in the vicinity of the indenter tip. This geometry is determined with a metrological Scanning Force Microscope. The uncertainty of the geometry measurement is analyzed for various indenter types. |
