| Zugriffsnummer | 13784 |
| Dokumenttyp | Zeitschriftenartikel |
| Sprache | Englisch |
| Titel | Nanoscale patterning of self-assembled monolayers with electrons |
| Autor(in); Institution |
Gölzhäuser, Armin; Universität Heidelberg, Angewandte Physikalische Chemie, Heidelberg, GERMANY
Geyer, W.; Universität Heidelberg, Angewandte Physikalische Chemie, Heidelberg, GERMANY
Stadler, V.; Universität Heidelberg, Angewandte Physikalische Chemie, Heidelberg, GERMANY
Eck, W.; Universität Heidelberg, Angewandte Physikalische Chemie, Heidelberg, GERMANY
Grunze, M.; Universität Heidelberg, Angewandte Physikalische Chemie, Heidelberg, GERMANY
Edinger, K.; University of Maryland, Laboratory for Ion Beam Research, USA
Weimann, Thomas; 2.404, Nanostrukturen für technische Anwendungen, PTB-Braunschweig
Hinze, Peter; 2.404, Nanostrukturen für technische Anwendungen, PTB-Braunschweig
|
| Quelle/Jahr | Journal of vacuum science and technology B: 18 (2000), 6, 3414 - 3418 |
| ISSN | 0734-211X |
| DOI | |
| Klassifikationscode | PACS: 85.40.Ux ; PACS: 85.40.Hp ; PACS: 68.18.+p ; PACS: 81.65.Cf |
| Freie Schlagworte | gold ; nanotechnology ; focused ion beam technology ; electron beam lithography ; proximity effect (lithography) ; etching ; atomic force microscopy ; scanning electron microscopy ; monolayers ; self-assembly ; electron resists ; organic compounds |
| Zusammenfassung | We show the fabrication of gold nanostructures using self-assembled monolayers of aliphatic and aromatiac thiols as positive and negative electron beam resists. We applied a simple and versatile proximity printing technique using focused ion beam structured stencil masks and low energy (300 eV) electrons. We also used conventional e-beam lithography with a beam energy of 2.5 keV and doses from 3500 to 80000 λC/cm2 Gold patterns were generated by wet etching in KCN/KOH and characterized by atomic force microscopy and scanning electron microscopy. The width of the finest lines is ≈ 20 nm; their edge definition is limited by the isotropic etching process in the polycristalline gold. |
Zitierung
Gölzhäuser, A., Geyer, W., Stadler, V., Eck, W., Grunze, M., Edinger, K., Weimann, T., & Hinze, P. (2000). Nanoscale patterning of self-assembled monolayers with electrons. Journal of vacuum science and technology B, 18(6), 3414–3418. https://doi.org/10.1116/1.1319711