| Zugriffsnummer | 13702 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Software and control system of the PTB nanometer length comparator [poster] |
| Autor(in); Institution |
Flügge, Jens; 5.203, Nanometerkomparator, PTB-Braunschweig
Dai, Gaoliang; Physik Instruments, Waldbrunn, GERMANY
Köning, Rainer; 5.203, Nanometerkomparator, PTB-Braunschweig
|
| Quelle/Jahr | Precision engineering, nanotechnology : proceedings of the 2nd International Conference, European Society for Precision Engineering and Nanotechnology: 2 (2001), 548 - 551 |
| Herausgeber(in) |
Balsamo, A.; CNR-IMGC, Torino, ITALY
|
| Verlag | Turin: |
| Konferenzangaben | Euspen 2nd International Conference, Torino, 27-31, May, 2001, Italy |
| Freie Schlagworte | data acquisition ; abbe error ; mult axis control |
| Zusammenfassung | The PTB nanometer length comparator was developed to be used as an universal measurement machine for one dimensional calibrations of photomasks, line scales, linear encoders, laser interferometers and long range probes. The software design must be flexible enough to handle different measurement objects and localisation sensors and complete measurement systems as supplied by customers. The nanometer comparator is an attempt to improve a very high precision mechanical system by additional measurement and software based control techniques. |
