| Zugriffsnummer | 13698 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Measuring micrometer steps with nanometer resolution |
| Autor(in); Institution |
Meiners-Hagen, Karl; 5.21, Längenmessmittel, PTB-Braunschweig
Wolf, Michael; 5.21, Längenmessmittel, PTB-Braunschweig
Abou-Zeid, Ahmed; 5.21, Längenmessmittel, PTB-Braunschweig
|
| Quelle/Jahr | Precision engineering, nanotechnology : proceedings of the Euspen 2nd International Conference, European Society for Precision Engineering and Nanotechnology. Vol. 1:(2001), 226 - 229 |
| Herausgeber(in) |
Balsamo, A.; CNR-IMGC, Torino, ITALY
|
| Verlag | Turin: |
| Konferenzangaben | Euspen 2nd International Conference, Torino, 27-31, May, 2001, Italy |
| Freie Schlagworte | surface analysis ; multi wavelength interferometry ; diode laser |
| Zusammenfassung | Measurements of step heights in the micrometer range offers the possibility for comparing solid measures of nearly equal length. Using a laser interferometer it is possible to achieve a nanometer resolution. This was demonstrated by comparing gauge blocks with lengths of 1.01 mm to 1.1 mm, mounted on a base plate. The use of a scanning diode laser interferometer allows surface measurements within a range of 100 μm height difference with a lateral resolution of 5 μm. This set-up can also be used for surface profilometry. |
