| Zugriffsnummer | 13012 |
| Dokumenttyp | Konferenzartikel in Zeitschrift |
| Sprache | Englisch |
| Titel | SQUID-NDE of semiconductor samples with high spatial resolution |
| Autor(in); Institution |
Beyer, Jörn; 7.13, Kryosensorik, PTB-Berlin
Schurig, Thomas; 7.13, Kryosensorik, PTB-Berlin
Lüdge, Anke; Institut für Kristallzüchtung, Berlin, GERMANY
Riemann, Helge; Institut für Kristallzüchtung, Berlin, GERMANY
|
| Quelle/Jahr | Superconductor Science and Technology: 13 (2000), 5, 532 - 536 |
| ISSN | 0953-2048 |
| DOI | |
| Verlag | Bristol [u.a.]: IOP |
| Konferenzangaben | European Conference on Applied Superconductivity, Sitges, 14-17, September, 1999, Spain |
| Klassifikationscode | PACS: 85.25.Dq ; PACS: 74.40.+k ; PaCS: 72.40.+w ; PACS: 74.25.Fy ; PACS: 61.72.up |
| Zusammenfassung | We developed a SQUID-based, noninvasive method for the investigation of semiconductor wafers. It is based on the detection of excited photocurrents via their magnetic field by means of a highly sensitive SQUID system. Our method allows the visualization of small growth-related fluctuations of the doping level of the semiconductor with a spatial resolution of a few tens of a micrometre determined by the excitation spot size. Numerical simulations of the magnetic signals have been performed, the results of which show a reasonable agreement with the experiments. |
