| Zugriffsnummer | 12993 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Gas flux distribution in a new PTB primary standard for very low pressures |
| Übersetzungstitel | Badania symulacyjne nowego wzorca wysokiej i ultrawysokiej prózni opracowanego w PTB |
| Autor(in); Institution |
Szwemin, Piotr; Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Warsaw, POLAND
Szymanski, K.; Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Warsaw, POLAND
Jousten, Karl; 7.23, Vakuummetrologie, PTB-Berlin
|
| Quelle/Jahr | Techniki prozni i technologie prozniowe : wybrane materialy V Krajowej Konferencji Techniki Prozni i V Polsko Bialosruskiego Sympozjum Technologii Prozniowych:(1999), 135 - 139 |
| Schriftenreihe | Prace Naukowe - Politechniki Warszawskiej, Elektronika: 123 |
| ISSN | 0137-2343 |
| Verlag | Warszawa: Wyd. Politechniki Warsz. |
| Konferenzangaben | V Krajowej Konferencji Techniki Prozni i V Polsko Bialosruskiego Sympozjum Technologii Prozniowych, Borkikolo Tomaszowa Mazowieckiego, 09-11, June, 1999, Poland |
| Zusammenfassung | The Physikalisch-Technische Bundesanstalt (PTB), Germany, has recently constructed a new primary standard of low pressures based on the continuous expansion method. The paper is concerned with the properties of the gas flow in one of the calibration chambers of this standard. To describe thes properties it is essential to know, with the smallest possible uncertainty the local gas densities at points where the tested gauges are installed. The problem was handled by the Monte Carlo method. The gas flux density on the chamber walls and the correction factors for each gauge port were determined (the highest value of the factor was (-32.9± 0.6)x10-4 (3σ)). |
Zitierung
Szwemin, P., Szymanski, K., & Jousten, K. (1999). Gas flux distribution in a new PTB primary standard for very low pressures. V Krajowej Konferencji Techniki Prozni i V Polsko Bialosruskiego Sympozjum Technologii Prozniowych, Borkikolo Tomaszowa Mazowieckiego, 09-11, June, 1999, Poland.