| Zugriffsnummer | 12966 |
| Dokumenttyp | Zeitschriftenartikel |
| Sprache | Englisch |
| Titel | Electron cyclotron resonance light source assembly : a vacuum-ultraviolet radiation source based on an electron cyclotron resonance plasma |
| Autor(in); Institution |
Grübling, Peter; 7.11, UV- und VUV-Radiometrie, PTB-Berlin
Hollandt, Jörg; 7.11, UV- und VUV-Radiometrie, PTB-Berlin
Ulm, Gerhard; 7.1, Photonenradiometrie, PTB-Berlin
|
| Quelle/Jahr | Review of Scientific Instruments: 71 (2000), 2, 1200 - 1202 |
| ISSN | 0034-6748 |
| DOI | |
| Verlag | Melville, NY: AIP |
| Klassifikationscode | PACS: 42.72.Bj ; PACS: 52.50.Gj |
| Zusammenfassung | A vacuum-ultraviolet radiation source based on an electron cyclotron resonance plasma was developed. Electron cyclotron resonance light source assembly (ELISA) is a 10 GHz monomode source of compact design featuring a tunable cavity and permanent magnets which can be axially positioned. The radiation emission of the source can be detected simultaneously in the vacuum-ultraviolet spectral range via a toroidal grating monochromator and in the x-ray spectral range via a Si(Li) detector. Spectroscopic investigations of a krypton and a neon plasma in the 9 - 27 nm spectral range show that ELISA produces complex line spectra of highly ionized atoms by applying only 12 W microwave power. |
Zitierung
Grübling, P., Hollandt, J., & Ulm, G. (2000). Electron cyclotron resonance light source assembly : a vacuum-ultraviolet radiation source based on an electron cyclotron resonance plasma. Review of Scientific Instruments, 71(2), 1200–1202. https://doi.org/10.1063/1.1150427