| Zugriffsnummer | 12919 |
| Dokumenttyp | Zeitschriftenartikel |
| Sprache | Englisch |
| Titel | Combined optical and X-ray interferometry for high-precision dimensional metrology |
| Autor(in); Institution |
Basile, G.; Istituto di Metrologia Gustavo Colonnetti (IMGC), Torino, ITALY
Becker, Peter; Q.201, Avogadro, PTB-Braunschweig
Bergamin, A.; Istituto di Metrologia Gustavo Colonnetti (IMGC), Torino, ITALY
Cavagnero, G.; Istituto di Metrologia Gustavo Colonnetti (IMGC), Torino, ITALY
Franks, A.; National Physical Laboratory, Teddington, UK
Jackson, K.; National Physical Laboratory, Teddington, UK
Kuetgens, Ulrich; Q.201, Avogadro, PTB-Braunschweig
Mana, G.; Istituto di Metrologia Gustavo Colonnetti (IMGC), Torino, ITALY
Palmer, E. W.; National Physical Laboratory, Teddington, UK
Robbie, C. J.; National Physical Laboratory, Teddington, UK
Stedman, M.; National Physical Laboratory, Teddington, UK
Stümpel, Jürgen; Q.201, Avogadro, PTB-Braunschweig
Yacoot, A.; National Physical Laboratory, Teddington, UK
Zosi, G.; University of Turin, Istituto di Fisica Generale A. Avogadro, Torino, ITALY
|
| Quelle/Jahr | Proceedings of the Royal Society of London A: 456 (2000), 701 - 729 |
| ISSN | 1364-5021 |
| Verlag | London: Royal Society |
| Freie Schlagworte | Calibration ; nanometrology ; optical interferometer ; traceability ; X-ray interferometer ; X-ray optics |
| Zusammenfassung | The requirement for calibrating transducers having subnanometre displacement sensitivities stimulated the development of an instrument in which the displacement is measured by a combination of optical and X-ray interferometry. The need to combine both types of interferometry arises from the fact that optical interferometry enables displacements corresponding to whole numbers of optical fringes to be measured very precisely, but subdivision of an optical fringe may give rise to errors that are significant at the subnanometre level. The X-ray interferometer is used to subdivide the optical fringes. Traceability to the meter is achieved via traceable calibrations of the lattice parameter of silicon and of the laser frequency. |
Zitierung
Basile, G., Becker, P., Bergamin, A., Cavagnero, G., Franks, A., Jackson, K., Kuetgens, U., Mana, G., Palmer, E. W., Robbie, C. J., Stedman, M., Stümpel, J., Yacoot, A., & Zosi, G. (2000). Combined optical and X-ray interferometry for high-precision dimensional metrology. Proceedings of the Royal Society of London A, 456, 701–729.