| Zugriffsnummer | 12841 |
| Dokumenttyp | Zeitschriftenartikel |
| Sprache | Englisch |
| Titel | Characterisation of layered heterostructures by means of HRTEM and digital image processing |
| Autor(in); Institution |
Ade, George; 2.404, Elektronenstrahlmikroskopie und -lithographie, PTB-Braunschweig
|
| Quelle/Jahr | Microelectronic Engineering: 51-52 (2000), 3 - 9 |
| ISSN | 0167-9317 |
| Freie Schlagworte | Heterostructures ; image processing ; interfaces ; layer thickness |
| Zusammenfassung | The layer thickness and the quality of interfaces in GaAs/AlAs multilayer systems are investigated by means of transmission electron microscopy and digital image-processing techniques. The position of interfaces generally cannot be accurately determined from lattice images by visual inspection. This is particularly true when thin layer systems are considered. The desired information on the parameters of interest can, however, easily be obtained fromimages reconstructed by means of the so-called phase method. The AlAs-GaAs interfaces are found to be more abrupt than the GaAs-AlAs interfaces. |
