| Zugriffsnummer | 12693 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Accuracy raise of micro- and nanohardness measurements by determination of the indenter geometry with a scanning force microscope |
| Autor(in); Institution |
Herrmann, Konrad; 5.12, Mikro- und Nanotopographie, PTB-Braunschweig
Hasche, Klaus; 5, Fertigungsmesstechnik, PTB-Braunschweig
Pohlenz, Frank; 5.12, Mikro- und Nanotopographie, PTB-Braunschweig
Seemann, Reiner; 5.12, Mikro- und Nanotopographie, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings of the 4th Seminar on Quantitative Microscopy QM 2000 : dimensional measurements in the micro- and nanometre range:(2000), 132 - 138 |
| Schriftenreihe | PTB-Bericht PTB-F-39 |
| Herausgeber(in) |
Hasche, Klaus; 5, Fertigungsmesstechnik, PTB-Braunschweig
Mirandé, Werner; 4.22, Bildanalyse, PTB-Braunschweig
Wilkening, Günter; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
|
| ISSN | 0179-0609 |
| ISBN | 3-89701-503-X |
| Berichtsnummer | PTB-F-39 |
| Verlag | Braunschweig: Physikalisch-Technische Bundesanstalt |
| Konferenzangaben | 4th Seminar on Quantitative Microscopy, QM 2000, Semmering, 12-14, January, 2000, Austria |
| Freie Schlagworte | Nanoindentation test ; microhardness ; indenter ; calibration method ; scanning force microscope |
| Zusammenfassung | An international comparison in the field of the indentation method on thin layers in the framework of CIRP carried out in the years from 1993 until 1997 led to the result that the reproducibility between the participating laboratories amounted to sr = 23 % until 59 %. If we interpret this value as the state of the art for the uncertainty of the nanoindentation method in that period, we can draw the conclusion that it is possible through calibration of the indenter geometry with a calibrated SFM to keep a relative uncertainty of nanohardness U < 15 %. By the use of SFM's calibrated with laserinterferometers traceable measurements of the indenter geometry are realized. The degree of agreement of area functions determined by SFM and with reference materials is fairly good, nevertheless it seems possible to improve it by further investigation of the method of determination of area functions with reference materials. Although the uncertainty of nanohardness measurements is mainly determined by the uncertainty of the indenter's area function it is necessary also to further develop calibration methods for the remaining influence factors like the depth and the force measuring systems of nanoindentation devices. |
Zitierung
Herrmann, K., Hasche, K., Pohlenz, F., & Seemann, R. (2000). Accuracy raise of micro- and nanohardness measurements by determination of the indenter geometry with a scanning force microscope. 4th Seminar on Quantitative Microscopy, QM 2000, Semmering, 12-14, January, 2000, Austria.