| Zugriffsnummer | 12673 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Proposal for a guideline to calibrate interference microscopes for use in roughness measurements |
| Autor(in); Institution |
Krüger-Sehm, Rolf; 5.12, Mikro- und Nanotopographie, PTB-Braunschweig
Perez, J. A. Luna; CEM, SPAIN
|
| Quelle/Jahr | Metrology & Properties of Engineering Surfaces, 8th International Conference, University of Huddersfield, 26th-29th April 2000. Conference proceedings:(2000), 16 S. |
| Herausgeber(in) |
University of Huddersfield
|
| Konferenzangaben | 8th International Conference on Metrology and Properties of Engineering Surfaces, Huddersfield, 26-28, April, 2000, UK |
| Freie Schlagworte | Interference Microscopy ; Roughness Measurement ; Measurement Uncertainty |
| Zusammenfassung | This proposal for a guideline for the calibration of interference microscopes has the intention to use the same items that are successfully practised in the guidelines for stylus instruments /1/, /2/. Many users from this field are involved to date also with optical surface measuring technique, so that they are familiar with the standard specimens and may accept easily the procedures suggested here. A model for the uncertainty of measurement is presented. |
