| Zugriffsnummer | 12655 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | 3D-tactile probe for dimensional metrology on microsystem components |
| Autor(in); Institution |
Kleine-Besten, Thomas; 5.101, Mikrosystem-Messtechnik, PTB-Braunschweig
Cao, Shizhi; 5.101, Mikrosystem-Messtechnik, PTB-Braunschweig
Hoffmann, Wolfgang; 5.101, Mikrosystem-Messtechnik, PTB-Braunschweig
Brand, Uwe; 5.101, Mikrosystem-Messtechnik, PTB-Braunschweig
Schlachetzki, Andreas; TU Braunschweig, Institut für Halbleitertechnik, Braunschweig, GERMANY
Bütefisch, Sebastian; TU Braunschweig, Institut für Mikrotechnik, Braunschweig, GERMANY
Schmidt, Martin; TU Braunschweig, Institut für Mikrotechnik, Braunschweig, GERMANY
Büttgenbach, Stephanus; TU Braunschweig, Institut für Mikrotechnik, Braunschweig, GERMANY
|
| Quelle/Jahr | MICRO.tec 2000: Proceedings: 2 (2000), 813 - 818 |
| ISBN | 3-8007-2579-7 |
| Verlag | Berlin [u.a.]: VDE-Verlag |
| Konferenzangaben | MICRO.tec 2000, VDE World Microtechnologies Congress, Hannover, 25-27, September, 2000, Germany |
| Freie Schlagworte | Boss Membrane ; Piezo Resistive ; Micro Force ; Coordinate Measurements |
| Zusammenfassung | Reliable techniques for dimensional measurements of microstructures are increasingly gaining in importance. For this purpose, a 3D tactile sensor has been developed on the basis of silicon micromachining technology, and its performance has been investigated. The report presents first results concerning resolution, repeatibility, linearity deviations and cross-talk behavior of the axes. Investigations of the probing process and the occuring forces are described. The aim is to achieve a 3D measurement uncertainty of -lt. 0.05 μm using the sensor type represented here. |
Zitierung
Kleine-Besten, T., Cao, S., Hoffmann, W., Brand, U., Schlachetzki, A., Bütefisch, S., Schmidt, M., & Büttgenbach, S. (2000). 3D-tactile probe for dimensional metrology on microsystem components. MICRO.tec 2000, VDE World Microtechnologies Congress, Hannover, 25-27, September, 2000, Germany.