| Zugriffsnummer | 12654 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Methods of characterising micro mechanical beams and its calibration for the application in micro force measurement systems |
| Autor(in); Institution |
Hoffmann, Wolfgang; 5.101, Mikrosystem-Messtechnik, PTB-Braunschweig
Loheide, Stefan; 5.101, Mikrosystem-Messtechnik, PTB-Braunschweig
Kleine-Besten, Thomas; 5.101, Mikrosystem-Messtechnik, PTB-Braunschweig
Brand, Uwe; 5.101, Mikrosystem-Messtechnik, PTB-Braunschweig
Schlachetzki, Andreas; TU Braunschweig, Institut für Halbleitertechnik, Braunschweig, GERMANY
|
| Quelle/Jahr | MICRO.tec 2000: Proceedings: 2 (2000), 819 - 823 |
| ISBN | 3-8007-2579-7 |
| Verlag | Berlin [u.a.]: VDE-Verlag |
| Konferenzangaben | MICRO.tec 2000, VDE World Microtechnologies Congress, Hannover, 25-27, September, 2000, Germany |
| Freie Schlagworte | Micro Force ; Piezo Resistive ; Silicon Beam ; Mechanical Properties ; compensation balance |
| Zusammenfassung | Different cantilever force sensors - from industrial production as well as from research instituts - are investigated and characterised. These silicon based cantilevers are used for tactile measurements in micro metrology. To characterise such sensors, a micro force measurement device consisting of a precision 1D-translation stage and a compensation balance was developed. Measuring the micro forces respectively stress signals during probing with the beams, it was possible to determine their mechanical properties. Calculated and measured beam stiffness values of both sensor types show a good agreement. The results show that the investigated sensors can be calibrated by the micro force measurement device and can be used for micro force measurements in the range of 1my.N - 200 μN. |
Zitierung
Hoffmann, W., Loheide, S., Kleine-Besten, T., Brand, U., & Schlachetzki, A. (2000). Methods of characterising micro mechanical beams and its calibration for the application in micro force measurement systems. MICRO.tec 2000, VDE World Microtechnologies Congress, Hannover, 25-27, September, 2000, Germany.