| Zugriffsnummer | 12653 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Silicon three-axial tactile sensor for micromaterial characterization |
| Autor(in); Institution |
Bütefisch, Sebastian; TU Braunschweig, Institute for Microtechnology, Braunschweig, GERMANY
Büttgenbach, Stephanus; TU Braunschweig, Institute for Microtechnology, Braunschweig, GERMANY
Kleine-Besten, Thomas; 5.101, Mikrosystem-Messtechnik, PTB-Braunschweig
Brand, Uwe; 5.101, Mikrosystem-Messtechnik, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings : 3rd International Conference and Poster Exhibition Micro Materials, MicroMat 2000, April 17 - 19, 2000, Berlin, Germany:(2000), 420 - 425 |
| Herausgeber(in) |
Michel, B.
Winkler, T.
|
| ISBN | 3-932434-15-3 |
| Verlag | Dresden: Ddp Goldenbogen |
| Konferenzangaben | 3rd International Conference and Poster Exhibition Micro Materials ; MicroMat 2000, Berlin, 17-19, April, 2000, Germany |
| Freie Schlagworte | 3D tactile force sensor ; micromechanics ; micro material characterization ; micrometrology ; spring constant ; Young's modulus of elasticity ; contacting process ; measuring forces |
| Zusammenfassung | A three-axial tactile force sensor for the investigation of micromechanical structures has been developed using silicon micromachining technology. The sensor is capable of performing micro material characterisation such as the determination of the spring constant of complex micromechanical structures. Additionally the sensor has been used as a 3D probe in a test set-up for dimensional metrology where it showed very promising results. High linearity and resolution were observed. First investigations were made using a tungsten wire as a probe pin. To mount this wire on the boss a hole of 130 μm diameter has been cut with a Nd:YAG laser and the wire was fixed in the hole with epoxy resin. |
