| Zugriffsnummer | 12561 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | A calibrated Scanning Force Microscope with capabilities in the subnanometer range |
| Autor(in); Institution |
Hasche, Klaus; 5, Fertigungsmesstechnik, PTB-Braunschweig
Herrmann, Konrad; 5.12, Mikro- und Nanotopographie, PTB-Braunschweig
Mirandé, Werner; 4.22, Bildanalyse, PTB-Braunschweig
Seemann, Reiner; 8.201, Medizinische Messdatenerfassungssysteme, PTB-Berlin
Vitushkin, Leonid; Bureau International des Poids et Mesures (BIPM), Sèvres, FRANCE
Xu, Min; 5.12, Mikro- und Nanotopographie, PTB-Braunschweig; Tsinghua University, Beijing, CHINA
Yu, Guoqiang; 5.12, Mikro- und Nanotopographie, PTB-Braunschweig; Tianjin University, Tianjin,CHINA
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| Quelle/Jahr | 4th International Conference on the Development and Technological Application of Scanning Probe Methods:(2000), 16 S. |
| Konferenzangaben | 4th International Conference on the Development and Technological Application of Scanning Probe Methods ; SXM4, Münster, 25-27, September, 2000, Deutschland |
| Freie Schlagworte | Scanning force microscopy ; mianture coordinate measuring instruments ; traceability of measurement results ; calibration ; subnanometer uncertainty |
| Zusammenfassung | This paper refers to quantitative Scanning Force Microscopy and dimensional measurement being traceable to metrological standards. The traceability to the unit of length is achieved by calibration of several thousands of selected and sufficiently defined reference positions within the three dimensional measuring range by three minature laser interferometers and their output signals at distances of lambda/2 (lambda corresponds with the wavelength of the He/Ne-laser radiation). The expanded uncertainty of the laser interferometer output signals is estimated at 1 nm. The results reported here refer to the reduction of uncertainty in the sub-nanometer range by comparisons of measured periods of one-dimensional sinusoidal gratings using optical diffractometry with expanded uncertainties scmaller than 0.1 nm, as well as the SFM with an uncertainty originally estimated at 1 nm. The goal is to reduce the uncertainty of the SFM as far as possible. The present state of work allows to estimate an expanded uncertainty of 0.4 nm, ..., 0.6 nm. It is hoped to reach a value near the picometer range. Former results have been reported at SXM2 and SXM3. The practical goal is to apply this microscopy to evaluations (calibrations) of dimensional parameters of objects in the semiconductor technology and other dimensional micro and nano structures. |
Zitierung
Hasche, K., Herrmann, K., Mirandé, W., Seemann, R., Vitushkin, L., Xu, M., & Yu, G. (2000). A calibrated Scanning Force Microscope with capabilities in the subnanometer range. 4th International Conference on the Development and Technological Application of Scanning Probe Methods ; SXM4, Münster, 25-27, September, 2000, Deutschland.