| Zugriffsnummer | 12558 |
| Dokumenttyp | Zeitschriftenartikel |
| Sprache | Deutsch |
| Titel | Über einige kalibrierte Rasterkraftmikroskope in der PTB : about several calibrated scanning force microscopes in the PTB |
| Autor(in); Institution |
Hasche, Klaus; 5, Fertigungsmesstechnik, PTB-Braunschweig
Herrmann, Konrad; 5.12, Mikro- und Nanotopographie, PTB-Braunschweig
Mirandé, Werner; 4.22, Bildanalyse, PTB-Braunschweig
Seemann, Reiner; 5.12, Mikro- und Nanotopographie, PTB-Braunschweig
Ahbe, Thomas; 5.12, Mikro- und Nanotopographie, PTB-Braunschweig
|
| Quelle/Jahr | Technisches Messen: 67 (2000), 7-8, 306 - 312 |
| ISSN | 0171-8096 |
| DOI | |
| Verlag | München: Oldenbourg |
| Freie Schlagworte | Rasterkraftmikroskopie ; Rückführbarkeit ; Miniatur-Koordinatenmessgeräte |
| Zusammenfassung | Three miniature laser interferometers have been fitted to a commercial Scanning Force Microscope, a modification serving to improve its metrological performance. This SFM is used for topographical measurements including calibration of geometrical standards. In order to avoid the influence of Abbé-errors a new arrangement of the laser interferometers without Abbe-offset has been developed and built. Furthermore is reported on a combination of the SFM with a sophisticated detection system of another commercial SFM which allows to carry out various alternative detection methods. Finally, an evaluation procedure for topographical measurements on the basis of non-orthogonal trigonometrical functions is outlined. |
Zitierung
Hasche, K., Herrmann, K., Mirandé, W., Seemann, R., & Ahbe, T. (2000). Über einige kalibrierte Rasterkraftmikroskope in der PTB : about several calibrated scanning force microscopes in the PTB. Technisches Messen, 67(7-8), 306–312. https://doi.org/10.1524/teme.2000.67.7-8.306