| Zugriffsnummer | 12552 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Calibration of transfer standards for SPM |
| Autor(in); Institution |
Koenders, Ludger; 5.12, Mikro- und Nanotopographie, PTB-Braunschweig
Krüger-Sehm, Rolf; 5.12, Mikro- und Nanotopographie, PTB-Braunschweig
Wilkening, Günter; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings of the 4th Seminar on Quantitative Microscopy QM 2000 : dimensional measurements in the micro- and nanometre range, applications, challenges, state-of-the-art:(2000), 25 - 29 |
| Schriftenreihe | PTB-Bericht PTB-F-39 |
| Herausgeber(in) |
Hasche, Klaus; 5, Fertigungsmesstechnik, PTB-Braunschweig
Mirandé, Werner; 4.22, Bildanalyse, PTB-Braunschweig
Wilkening, Günter; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
|
| ISSN | 0179-0609 |
| ISBN | 3-89701-503-X |
| Berichtsnummer | PTB-F-39 |
| Verlag | Braunschweig: Physikalisch-Technische Bundesanstalt |
| Konferenzangaben | 4th Seminar on Quantitative Microscopy - QM 2000, Semmering, 12-14, January, 2000, Austria |
| Zusammenfassung | Two companies and three national metrology laboratories are engaged in a concerted effort (EU-project) to produce and certify a complete set of nanometre scale transfer standards. This includes laterals as well as step height standards. An additional flatness test sample is used to verify the quality of the SPM scanning plane properties, and the noise of the instrument. In the following the designs of the flatness sample and the step height standards will be shown and the calibration procedure by interference microscopy and the resulting uncertainty budget will be discussed. |
