| Zugriffsnummer | 12489 |
| Dokumenttyp | Konferenzartikel in Zeitschrift |
| Sprache | Englisch |
| Titel | Patterning self-assembled monolayers with electrons |
| Autor(in); Institution |
Gölzhäuser, Armin; Universität Heidelberg, Angewandte Physikalische Chemie, Heidelberg, GERMANY
Geyer, Wolfgang; Universität Heidelberg, Angewandte Physikalische Chemie, Heidelberg, GERMANY
Stadler, V.; Universität Heidelberg, Angewandte Physikalische Chemie, Heidelberg, GERMANY
Eck, W.; Universität Heidelberg, Angewandte Physikalische Chemie, Heidelberg, GERMANY
Grunze, M.; Universität Heidelberg, Angewandte Physikalische Chemie, Heidelberg, GERMANY
Weimann, Thomas; 2.404, Elektronenstrahlmikroskopie und -lithographie, PTB-Braunschweig
Hinze, Peter; 2.404, Elektronenstrahlmikroskopie und -lithographie, PTB-Braunschweig
Edinger, K.; University of Maryland, College Park, MD, USA
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| Quelle/Jahr | Papers from the 44th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication. Journal of Vacuum Science and Technology B: 18 (2000), 6, 3414 - 3418 |
| ISSN | 0734-211X ; 1071-1023 |
| ISBN | 1-563-96969-6 |
| Verlag | New York, NY: AIP |
| Konferenzangaben | 44th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, Rancho Mirage, Calif., 30, May - 02, June, 2000, USA |
| Freie Schlagworte | self assembling monolayer ; e-beam lithography ; resist |
| Zusammenfassung | We show the fabrication of gold nanostructures using aliphatic and aromatic thiol self-assembled monolayers as positive and negative electron beam resists. We applied a simple and versatile projection technique using FIB structured stencil masks and low energy (50 eV) electrons. We also used conventional e-beam lithography with a beam energy of 2.5 keV and doses from 3.5 to 80 mC/cm2. Gold patterns were generated by a wet etch in 1 M KCN / 2M KOH and characterized by AFM and SEM. The finest lines are ~20 nm, their edge definition is limited by the isotropic etching process in the polycrystalline gold. |
