| Zugriffsnummer | 11697 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Deutsch |
| Titel | Lösungsbeispiele für quantitative Rastersondenmikroskopie in der Mikro- und Nanotechnik |
| Autor(in); Institution |
Hasche, Klaus; 5, Fertigungsmesstechnik, PTB-Braunschweig
Herrmann, Konrad; 5.21, Härte und Schichtdicke, PTB-Berlin
Büchner, Hans; Technische Universität Ilmenau, Fakultät Maschinenbau, Ilmenau, GERMANY
Pohlenz, Frank; 5.21, Härte und Schichtdicke, PTB-Berlin
Seemann, Reiner; 5.21, Härte und Schichtdicke, PTB-Berlin
|
| Quelle/Jahr | Maschinenbau im Informationszeitalter : 44. Internationales Wissenschaftliches Kolloquium: 1 (1999), 68 - 73 |
| Herausgeber(in) |
Gens, Wolfgang
|
| Verlag | Ilmenau: Techn. Universität |
| Konferenzangaben | 44. Internationales Wissenschaftliches Kolloquium der Technischen Universität Ilmenau, Ilmenau, 20-23, September, 1999, Germany |
| Freie Schlagworte | Scanning probe microscopy ; laserinterferometer ; nanotechnology |
| Zusammenfassung | In co-operation with the TU Ilmenau and SIOS GmbH, Ilmenau, commercial scanning probe microscopes (SPM) which in themselves show interesting measuring technical characteristics have been modified to the effect that the obtained measuring results can be retraced to accepted metrological standards. The modification of the SPM comprises mainly the additional implementation of a miniature laser interferometer for the calibration of three motion axes as well as the development of methods by which the SPM is being examined during calibration as a three-coordinates measuring system, and, compared with the present standard of quantitative scanning probe microscopy, is treated relatively consequently in respect of spatial position deviations. Representative experiences with a scanning force microscope (AFM) VERITEKT 3 which is used for different topographical measurements, e.g. for the definition of thickness of coatings, the determination of the geometry of micro- respectively nanohardness indenters or for optical microstructures are available. The instrument is meanwhile routinely applied to calibrate standards for thin coatings and microhardness indenters. Another AFM of the same type which is combined with the detection system of an SPM of Park Scientific Inc. is presently in the completion phase. With this AFM interactions between detection system and measuring object can be determined, e.g. magnetic force interactions or various specific phase modulations, which allow conclusions with regard to different characteristics of the investigated materials. The paper addresses the structure of the modified SPM as well as the method and results of the calibration. Furthermore it gives an overview over the applications of the SPM. |
| Rechteinformation | 1999, Techn. Univ. Ilmenau |
Zitierung
Hasche, K., Herrmann, K., Büchner, H., Pohlenz, F., & Seemann, R. (1999). Lösungsbeispiele für quantitative Rastersondenmikroskopie in der Mikro- und Nanotechnik. 44. Internationales Wissenschaftliches Kolloquium der Technischen Universität Ilmenau, Ilmenau, 20-23, September, 1999, Germany.