| Zugriffsnummer | 11680 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | 3D profiler with interferometric position measuring system [poster] |
| Autor(in); Institution |
Büchner, Hans; Technische Universität Ilmenau, Fakultät Maschinenbau, Ilmenau, GERMANY
Hannemann, Joachim; 5.21, Härte und Schichtdicke, PTB-Berlin
Jäger, Gerd; Technische Universität Ilmenau, Fakultät Maschinenbau, Ilmenau, GERMANY
Hasche, Klaus; 5, Fertigungsmesstechnik, PTB-Braunschweig
Herrmann, Konrad; 5.21, Härte und Schichtdicke, PTB-Berlin
Seemann, Reiner; 5.21, Härte und Schichtdicke, PTB-Berlin
Thiele, Kerstin; 5.21, Härte und Schichtdicke, PTB-Berlin
|
| Quelle/Jahr | Precision engineering - nanotechnology : proceedings of the 1st International EUSPEN conference: 2 (1999), 215 - 218 |
| Schriftenreihe | Berichte aus der Fertigungstechnik |
| Herausgeber(in) |
McKeown, Pat
Kunzmann, Horst; Präsidium, MP, PTB-Braunschweig
|
| ISBN | 3-8265-6085-X |
| Verlag | Aachen: Shaker |
| Konferenzangaben | Precision Engineering - Nanotechnology: 1st International Conference and General Meeting of the European Society for Precision Engineering and Nanotechnology (euspen), Bremen, 31, May - 04, June, 1999, Germany |
| Freie Schlagworte | 3D profiler ; laserinterferometer ; surface structure measurement |
| Zusammenfassung | A commercial wafer inspection device has been further developed into a 3D profiler with the aim of making possible determinations of surface structures in the measurement range 60 mm x 60 mm x 1 mm, with uncertainties of measurement in the nanometer range. The project essentially covered the development and integration into the 3D profiler a new laser-interferometric x-y positionmeasuring system and the calibration using special artefacts. The 3D profiler is used for the measurement of microstructures which are outside the measuring range of conventional AFM on the one hand and outside the measurement uncertainty of CMM on the other. Examples of application among other things are micro-structured lenses and conical indenters for Rockwell hardness measurement. |
| Rechteinformation | 1999, Shaker |
Zitierung
Büchner, H., Hannemann, J., Jäger, G., Hasche, K., Herrmann, K., Seemann, R., & Thiele, K. (1999). 3D profiler with interferometric position measuring system [poster]. Precision Engineering - Nanotechnology: 1st International Conference and General Meeting of the European Society for Precision Engineering and Nanotechnology (euspen), Bremen, 31, May - 04, June, 1999, Germany.